先進製造與封測設備

Advanced Manufacturing & Packaging Equipment

Advanced Manufacturing& Packaging Equipment High-precision Standard Reference Mirror

High-precision Standard Reference Mirror

Technical Description

A high-precision calibration flat mirror, precision-engineered through non-contact nanofabrication correction technologies, specifically atmospheric plasma figuring and ion beam figuring, achieving a surface figure accuracy of approximately 1/20 λ and an RMS surface roughness of less than 1/100 λ.

Photos

Contact

Name:翁志強
Phone:03-5918795
E-mail:peterweng@itri.org.tw