3D Digital Twin Simulation Technology for Semiconductor Process Development
Technical Features
This intelligent solution is tailored for the semiconductor industry, integrating virtual physical models with process data and using AI optimization to replicate key manufacturing steps, predict behaviors, and optimize parameters, enhancing efficiency and yield.
Technical Description
Digital Twin 3D simulation technology addresses the needs of semiconductor process development and optimization by constructing physical equations in a virtual environment and integrating real process data and parameters. This enables dynamic reconstruction and simulation of critical process steps, such as ion implantation.
Core technical features include:
•Real-time integration of sensor and process data to build dynamically updating 3D digital process models
• Application of AI algorithms for process parameter optimization, defect prediction, and anomaly diagnosis
•Multivariable “what-if” scenario simulations in a virtual environment to verify the effects of process adjustments
•Especially suitable for simulating and analyzing complex physical phenomena, including quantum mechanics, fluid dynamics, gas flow fields, and heat transfer
This technology supports yield improvement, reduction of development cycles, and the implementation of intelligent manufacturing processes—helping production lines achieve digitalization, automation, and continuous optimization.
Photos
Contact
Name:謝靜婷
Phone:03-5917801
E-mail:manahsieh@itri.org.tw
