Technical Features

The "High-Sensitivity Sensor Chip Process Platform Technology" showcases four representative module achievements: high-precision OCS MEMS micromirrors, precision vibration sensors, industrial/medical flow sensors, and magnetic sensors for position and motion detection. By leveraging sub-micron processing and heterogeneous integration technologies, the platform demonstrates Taiwan’s R&D and manufacturing capabilities in the field of high-sensitivity sensing.

Technical Description

The "High-Sensitivity Sensor Chip Manufacturing Platform Technology" demonstrates Taiwan's core capabilities in sensor chip fabrication. By leveraging sub-micron processing and a heterogeneous integration platform, four representative high-sensitivity sensor modules have been successfully developed. These include: a high-precision OCS MEMS micromirror for optical communication and scanning applications, featuring compact size and high actuation accuracy; a high-resolution vibration sensor designed for structural monitoring and equipment diagnostics, capable of reliably detecting minute vibration signals; a highly sensitive flow sensor for industrial gas control and monitoring, offering low power consumption and high reliability; and a magnetic sensor for position and motion tracking, with high signal-to-noise ratio and low drift characteristics. The platform integrates diverse materials and microstructures, and incorporates wafer-level packaging, vacuum cavity structures, and precision process control to overcome challenges such as weak signal detection, size constraints, and multifunctional integration. This achievement highlights Taiwan’s full-spectrum capabilities from design and prototyping to pilot production of high-sensitivity sensor devices, laying a solid foundation for the localization and autonomy of critical sensor technologies.

Photos